Optical Surface Profilers
Stage Position Metrology
Testing & Certification Services
ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI). The Verifire™ MST can measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within MetroPro® software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.
Simultaneously measures two-surface, three- and even four-surface cavities.
Greatly simplifies homogeneity metrology.
Measures front surface map, optical thickness variation, and the back surface approximation.
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