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3D Optical Surface Profilers
ZYGO's 3D Optical Profiler instruments enable precise, quantitative, ISO-compliant, non-contact surface measurement and characterization of micro- and nano-scale surface features, capturing up to two million data points in just seconds. Choosing the right optical profiler system depends on your application's requirements, including speed, precision, vertical range, automation, and flexibility.
Our 3D Optical Profiler instruments achieve best in class performance through advanced, patented, and differentiated technologies with superior speed, precision, resolution, and application versatility all in a single metrology instrument.
With multiple configurations that range from simple to use benchtop systems to advanced fully automated platforms, ZYGO's optical profilers have proven themselves in installations that range from R&D and standards laboratories to industrial process control workstations to in-line OEM metrology solutions.
Regardless of the installation type, our systems provide leading performance for optical measurements of surface structure and texture across varying surface scales and offer hundreds of reportable parameters, including areal surface roughness to ISO 25178 standards as well as 2D profile standards, ISO 4287/4288.
How Does ZYGO's Technology Compare? What Are Some Of The Key Advantages?
Our instruments include several advantages based on the core technology employed, system-level features and options, software functionality, and many others. For simplicity, we have compared our CSI-technology to two of the most common alternative optical technologies (confocal, focus variation). Highlighted below are just some of the key attributes and advantages.
• Higher speed
• Superior Z-resolution (independent of magnification)
• Wider magnification/FOV range
• Capable of measuring super-smooth to rough surfaces
What Are Some Of the Main Markets and Applications?
• Automotive & Precision Machining
• Micro-manufacturing & Nanotechnology
• Consumer Electronics & Displays
• Optics & Photonics
• Aerospace & Defense
SIMPLE TO USE,
MEASURE IT RIGHT
ON THE SHOP FLOOR!
PERFORMANCE, FLEXIBILITY, AND
WELL SUITED FOR
A WIDE RANGE OF
MEET YOUR NEEDS!
DESIGNED FOR THE
MEASURE IT ALL –
Specialty ModelsIn addition to the standard configurations, we have specialty models that apply CSI in a package tailored for specific applications which include:
Compass™ – For applications that require complete characterization of micro lenses and their alignment features, ZYGO's Compass™ system provides full surface, non-contact, 3D mapping of surface form and deviation, topography, and relational/dimensional metrology of spherical or aspherical lenses and molds with sub-nanometer height precision, and millions of data points.
APM650™ – The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.
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