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Products
Optical Surface Profilers
Laser Interferometers
Semiconductor Systems![]() ![]() ![]() Optical Surface Profilers ZeGage™ Pro NewView™ 9000 Nexview™ NX2 Guardian™ Industrial Enclosure New! APM650™ |
ZeGage™ Pro Production Ready 3D Optical Profiler![]()
Key Features:
Vibration-resistant, for metrology and process control on the production floor. ISO 25178-compliant results ensure confidence in your metrology. Non-contact, area-based metrology technique prevents part damage and is insensitive to part lay. Measurements require no consumables. The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of virtually any surface, and set the new standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. The base ZeGage™ Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples, with a much finer surface finish, the ZeGage™ Pro HR offers more than 20X higher precision with 0.15 nm vertical precision. ZYGO's ZeGage™ products have been taking interferometric surface profiling out of the lab and into production for nearly a decade. With the ZeGage Pro and Pro HR systems, powerful and trusted capabilities such as SureScan™ technology for vibration robust metrology are now paired with ZYGO's exclusive Part Finder and Smart Setup tools to make sample changes fast and easy, minimizing wasted time and maximizing throughput.
![]() Mx Software Screen (click image for a larger view)
Read more to see how the ZeGage™ Pro systems' power, versatility, and value can benefit you. Powerful Performance
Versatility
Productivity and Value
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